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Conference Paper Generative High-Magnification Image Synthesis for EUV Mask Inspection
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Authors
Hyejin S. Kim, Seongjin Choi
Issue Date
2025-10
Citation
International Conference on Information and Communication Technology Convergence (ICTC) 2025, pp.584-588
Language
English
Type
Conference Paper
KSP Keywords
EUV mask, image synthesis
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