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Conference Paper
Optimization of Annealing and Subsequent Processes for Improved Ohmic Contact Resistance in AlGaN/GaN HEMTs
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- Authors
- Gyejung Lee, Junhyung Kim, Kyujun Cho, Jong Yul Park, Byoung-Gue Min, Junhyung Jeong, Hong-Gu Ji, Woojin Chang, Jong-Min Lee, Dong-Min Kang
- Issue Date
- 2025-10
- Citation
- International Conference on Information and Communication Technology Convergence (ICTC) 2025, pp.1-3
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- AlGaN/GaN HEMTs, Contact resistance(73.40.Cg), Ohmic contact resistance