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Conference Paper
Fabrication of PPLNOI waveguides via in-situ poling monitoring and optimized dry etching conditions for efficient frequency conversion
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- Authors
- Tetiana Slusar, Hong-Seok Kim, Guhwan Kim, Jinwoo Kim, Jiho Park, Jin Tae Kim, Jaegyu Park, Min-su Kim, Jung Jin Ju, Kiwon Moon
- Issue Date
- 2025-06
- Citation
- Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) 2025, pp.1-1
- Language
- English
- Type
- Conference Paper
- Abstract
- Lithium niobate on insulator (LNOI) is an important high-χ(2) material platform for applications in nonlinear and quantum photonic integrated circuits [1]. Submicron-waveguide structures of periodically poled LNOI (PPLNOI) are particularly attractive, since they enable enhanced functionality through strong mode confinement and quasi-phase matching between different wavelengths, as well as improved scaling. To fully capitalize on these advantages, it is essential to fabricate waveguides with well-defined periodically poled domains and low optical losses, both of which remain technological challenges.
- KSP Keywords
- Different wavelengths, Etching conditions, In-Situ, Lithium niobate(LN), Optical losses, Waveguide Structure, Well-defined, dry etching, enhanced functionality, frequency conversion, integrated circuit(IC)