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Journal Article Growth Behaviors of InAs/GaAs Quantum Dots Using Metal−Organic Chemical Vapor Deposition with Dual-Channel AsH3 Supply and H2 Carrier Gas Flow Rate Variation
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Authors
HoSung Kim, Mireu Lee, Dae-Myeong Geum, Young-Ho Ko
Issue Date
2025-08
Citation
Crystal Growth and Design, v.25, no.16, pp.6628-6635
ISSN
1528-7483
Publisher
American Chemical Society
Language
English
Type
Journal Article
DOI
https://dx.doi.org/10.1021/acs.cgd.5c00547
KSP Keywords
Carrier Gas Flow Rate, Chemical Vapor Deposition, Flow rate variation, Growth behavior, InAs/GaAs quantum dots, Organic chemical, dual-channel, quantum dots(QD)