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Conference Paper
Impact of Hydrogen-Assisted RF Sputtering on the Electrical Properties of GaAs: A Comparative Study on n- and p-type Substrates
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- Authors
- Tae Ei Hong, Yong-Duck Chung, Dae-Hyung Cho, Woo-Jung Lee, Won Seok Han
- Issue Date
- 2026-03
- Citation
- 한국태양광발전학회 학술 대회 (춘계) 2026, pp.1-1
- Publisher
- 한국태양광발전학회
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- Electrical properties, Rf sputtering, comparative study, p-Type