In this study, superconducting resonators for high-frequency qubit applications were designed and analyzed using three-dimensional electromagnetic simulations based on the COMSOL RF Module. In superconducting quantum circuits, resonators are used to deliver and detect RF signals in the 5–10 GHz frequency range. Achieving high-performance qubit operation requires resonators with high quality factors and precisely controlled resonance frequencies.
Resonators targeting design frequencies of 5 GHz and 10 GHz were systematically optimized through parametric simulations. The high quality factors were achieved by carefully tuning geometric parameters, including the resonator length, layout geometry, and coupling gap. Based on the optimized design, Nb resonator circuits were fabricated using a maskless lithography process.
The fabricated devices were characterized under cryogenic conditions using S21 transmission measurements. The loaded quality factors (Ql) exceeded 100,000, demonstrating that the simulation-driven geometric optimization approach effectively enables high-Q superconducting resonators suitable for scalable quantum circuit applications.
Keyword
Superconductor, Q-bit, Quntum computing
KSP Keywords
10 Ghz, 5 GHz, Cryogenic conditions, Frequency range, Geometric optimization, Geometric parameters, High Q, High frequency(HF), High performance, Lithography process, Maskless lithography
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