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Conference Paper
Characterization of Nano-scale Direct-printing based on Dual-head Soft-nanolithography
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- Authors
- Kyu-Sung Lee, Junhee Han
- Issue Date
- 2026-04
- Citation
- Materials Research Society (MRS) Meeting 2026 (Spring), pp.1-1
- Publisher
- Materials Research Society
- Language
- English
- Type
- Conference Paper
- Abstract
- In this study, we investigated the characteristics of a direct-printing technology based on dual-head soft-nanolithography. We studied the formation of nanopatterns and additive structures by tip-based direct-printing using different materials. To adapt the technology to nano/bio device applications through the formation of ultra-precise 3D composite structures, we developed a method and an equipment for direct-printing of various functional materials at room temperature in a non-vacuum environment with simultaneous analysis. Based on a soft-nanolithography-based direct-printing technology similar to dip-pen printing and atomic force microscope nanoprobes, we applied a dual-head nanoscale direct-printing technology for 3D additive processes that enables continuous analysis after printing. This technology serves as a platform technology for simultaneous analysis devices. We measured the size uniformity of base patterns formed at different base pattern sizes using UV-curable polymers such as photo-acrylate. The size uniformity ranged from 3.1% to 10.7% for different pattern sizes. Line-width measurements using the direct-printing method for line patterns showed that printing was possible with an accuracy of ±56 nm for a reference linewidth of 2.4μm. Additive processing and the formation of 3D structures using UV-curing materials were confirmed in a volume range of 0.0048 to 1.1 μm3. While optimal conditions vary depending on the material and process environment (temperature and humidity), up to 185 prints were possible within the range visible with an optical microscope. By adjusting the print size within a certain range through processes such as dummy printing, the print size remained consistent within a range of approximately 20 prints during printing. The dual-head direct printing process and analysis module were important because they were necessary to overcome difficulties in verifying the printing process and the actual nanostructures. The dual-head method was also found to be advantageous for verifying printability while maintaining positional accuracy after the nano-printing process. This enabled analysis during direct printing, realizing an equipment concept that enables continuous printing of different materials using a hybrid subtractive and additive process. System upgrades, including a side-view camera, alignment chip, and UV-curing module, were implemented to improve the operability of the dual-head equipment. Furthermore, printing was performed using a hydrogel material that can be mixed with various materials, improving pattern accuracy and forming diverse patterns and structures. Quantum dots can be printed by applying them to a UV-curable hydrogel material as a solvent. By applying different materials individually to specific areas to form print patterns, this technology is expected to be useful in a variety of fields, including biomedical, electronics, and security.
- KSP Keywords
- 3D composite, 3D structures, Atomic force microscope(AFM), Base pattern, Composite structures, Different materials, Dip-pen, Line width, Nano-Scale, Non-vacuum, Optical Microscope