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Conference Paper
Doping-Dependent Effects of Hydrogen-Assisted Sputtering on GaAs during Zn(O,S) Buffer Layer Deposition
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- Authors
- Tae Ei Hong, Dae-Hyung Cho, Woo-Jung Lee, Won Seok Han, Yong-Duck Chung
- Issue Date
- 2026-06
- Citation
- International Symposium on the Physics of Semiconductors and Applications (ISPSA) 2026, pp.1-1
- Publisher
- 한국물리학회
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- Buffer layer, layer deposition