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Micro-OLED pixel array on glass using vertical oxide TFTs for high-resolution near-eye displays
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- Authors
- Jong-Heon Yang, Jae-Eun Pi, Yong-Hae Kim, Hee-Ok Kim, Seung-Youl Kang, Jaehyun Moon, Chan-Mo Kang, Hyunsu Cho, Kang Me Lee, Nak-Jin Seong, Y. Kwon, Kyu-Jeong Choi, Chi-Sun Hwang
- Issue Date
- 2026-01
- Citation
- SPIE OPTO 2026, pp.1-1
- Publisher
- SPIE
- Language
- English
- Type
- Conference Paper
- Abstract
- AR/VR near-eye displays (NEDs) require ultra-high-resolution pixel arrays to improve image quality and eliminate screen-door effects. While silicon-based OLEDoS offers excellent performance, it suffers from high cost and limited panel size. In this study, we demonstrate a 5 µm pixel-size OLED-on-Glass (OLEDoG) array using vertical InGaZnO TFTs as a cost-effective and scalable alternative. Compared to OLEDoS, OLEDoG enables large-area fabrication on glass substrates with significantly lower manufacturing cost, making it more suitable for mass production of AR/VR microdisplays. The vertical oxide TFTs were fabricated using atomic layer deposition (ALD) for conformal coating on narrow, high-aspect-ratio structures. This is the smallest pixel size reported for an active-matrix OLED array using TFTs on glass. The proposed OLEDoG technology offers a promising path toward high-resolution, large-area, and affordable displays for next-generation AR/VR devices.
- Keyword
- OLED-on-Glass (OLEDoG), Vertical Oxide TFT, IGZO TFT, High-Resolution Microdisplay, 5 µm Pixel Array, Atomic Layer Deposition (ALD), Near-Eye Display (NED), AR/VR Applications
- KSP Keywords
- Atomic Layer Deposition, Excellent performance, Glass substrate, IGZO TFTs, Image Quality, InGaZnO TFTs, Near-eye display, Next-generation, Oxide TFTs, Pixel array, Pixel size