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Conference Paper
Oxidation-Robust SiC Photonic Crystal Nanocavities for Stable Resonance
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- Authors
- H. Kim, B. S. Song, S. Noda, T. Asano
- Issue Date
- 2026-07
- Citation
- Advanced Photonics Congress 2026, pp.1-2
- Publisher
- Optica Publishing Group
- Language
- English
- Type
- Conference Paper
- Abstract
- We investigate surface oxidation effects in SiC photonic crystal nanocavities using ozone-based processing. Compared with Si nanocavities, SiC exhibits minimal and highly stable resonance shifts, demonstrating superior robustness against oxidation-induced optical perturbations under ambient conditions.
- KSP Keywords
- Highly stable, Oxidation effects, Photonic crystal nanocavities, Surface oxidation, ambient conditions, photonic crystal(PC)