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Conference Paper
Sub-20 nm Silicon Template Nanofabrication by Advanced Edge Patterning Technique for NIL Applications
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- Authors
- Kyu-Ha Baek, Kun-Sik Park, Lee-Mi Do, Dong-Pyo Kim, Zin-Sig Kim, Joo-Yeon Kim, Ki Jun Lee
- Issue Date
- 2010-12
- Citation
- International Conference on Nano Science and Nano Technology (ICNST) 2010, pp.384-385
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- 20 nm, Patterning technique