상세정보
학술대회
Chromatic Dispersion Measurement of Nano-Silicon Waveguides Using a White-Light Interferometry Method
- 저자
- Seung Hwan Kim, Seoung Hun Lee, Dong Wook Kim, Kyong Hon Kim, El-Hang Lee, 이종무
- 발행일
- 201101
- 출처
- Optoelectronic Integrated Circuits XIII (SPIE 7942), pp.1-7
- 협약과제
- 10MB5200, 6inch급 에피웨이퍼 기반 수직형 LED 칩용 Laser Lift-off 장비 개발, 이종무
- 초록
- We report a white-light Mach-Zehnder interferometry method for an accurate measurement of spectral distribution of the chromatic dispersion coefficient of very short optical waveguides over a wavelength range of 1520~1560 nm. The chromatic dispersion curve of a 7.6 mm long silicon nano-waveguide of 400 nm width and 250 nm height was successfully measured by confirming the method with standard single-mode fibers up to 3 cm length, for which its total chromatic dispersion is as small as 0.51 fs/nm. This method will be very useful for determination of chromatic dispersion profile of compact nanowaveguide devices.
- KSP 제안 키워드
- 1560 nm, Accurate measurement, Chromatic dispersion(CD), Mach-Zehnder(MZ), Mach-zehnder interferometry, Nano-silicon, Optical waveguides, Silicon waveguide, Single-mode fiber(SMF), White-light interferometry, chromatic dispersion coefficient