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Conference Paper Fabrication of ITO:Ta Thin Film Transistors by Co-sputtering
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Authors
Sung Mook Chung, Jae-Heon Shin, Chan-Hwa Hong, Woo-Seok Cheong
Issue Date
2011-10
Citation
International Conference on Nanoimprint and Nanoprint Technology (NNT)2011, pp.1-2
Language
English
Type
Conference Paper
KSP Keywords
Co-sputtering, Thin-Film Transistor(TFT), thin film(TF)
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