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Conference Paper
Fast Response Formaldehyde Gas Sensor for USN Application
- Authors
- N-. J. Choi, H-. K. Lee, S. E. Moon, W. S. Yang
- Issue Date
- 2011-09
- Citation
- Eurosensors 2011, pp.1073-1076
- Language
- English
- Type
- Conference Paper
- Abstract
- Semiconductor type gas sensors based on aluminum-doped zinc oxide with under 50 nm particle size were fabricated on Si substrate. The prepared materials were very fine and uniform and we found out that particle sizes were about 10-25 nm through X-ray diffraction analysis and scanning electron microscopy. Gas response characteristics were examined for formaldehyde (HCHO) gas existing in building. In particularly, the sensors showed responses to formaldehyde gas at sub ppm (cf, standard of natural environment in building is about 80 ppb), as a function of operating temperatures and gas concentrations. The lowest detection limit is HCHO 25 ppb and sensitivity of 800 ppb is over 60 % at 350°C operating temperature. The response time (8s) to HCHO gas was very fast compared to other commercial products in flow type measurement condition. Repetition measurement was very good with 짹2 % in full scale. © 2011 Published by Elsevier Ltd.
- KSP Keywords
- 5 nm, Aluminum-doped zinc oxide, Commercial products, Detection limit, Diffraction analysis, Fast Response, Flow type, Formaldehyde gas sensor, Full-scale, Gas concentration, Gas response
This work is distributed under the term of Creative Commons License (CCL)
(CC BY NC ND)
(CC BY NC ND)
