상세정보
학술대회
Fast Response Formaldehyde Gas Sensor for USN Application
- 발행일
- 201109
- 출처
- Eurosensors 2011, pp.1073-1076
- 협약과제
- 11MB2100, 스마트and그린 빌딩용 자가충전 지능형 센서노드 플랫폼 핵심기술 개발, 김종대
- 초록
- Semiconductor type gas sensors based on aluminum-doped zinc oxide with under 50 nm particle size were fabricated on Si substrate. The prepared materials were very fine and uniform and we found out that particle sizes were about 10-25 nm through X-ray diffraction analysis and scanning electron microscopy. Gas response characteristics were examined for formaldehyde (HCHO) gas existing in building. In particularly, the sensors showed responses to formaldehyde gas at sub ppm (cf, standard of natural environment in building is about 80 ppb), as a function of operating temperatures and gas concentrations. The lowest detection limit is HCHO 25 ppb and sensitivity of 800 ppb is over 60 % at 350°C operating temperature. The response time (8s) to HCHO gas was very fast compared to other commercial products in flow type measurement condition. Repetition measurement was very good with 짹2 % in full scale. © 2011 Published by Elsevier Ltd.
- KSP 제안 키워드
- 5 nm, Aluminum-doped zinc oxide, Commercial products, Detection limit, Flow type, Formaldehyde gas sensor, Full scale, Gas response, Measurement condition, Natural environment, Response characteristics