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Conference Paper High Performance Nonstick Replicas for High-Resolution Nanoimprint Lithography
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Authors
Bong Kuk Lee, Kun-Sik Park, Ye Sul Jeong, Kyu-Ha Baek, Lee-Mi Do, Ki Jun Lee
Issue Date
2011-10
Citation
International Conference on Nanoimprint and Nanoprint Technology (NNT) 2011, pp.211-212
Language
English
Type
Conference Paper
KSP Keywords
High performance, High-resolution, nanoimprint lithography