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Conference Paper Non-Collapsible PDMS Nanochannel Fabrication with Tunable Width and Height using Single Master Mold
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Authors
Chang-Beom Kim, Honggu Chun, JaeHun Chung, Ki-Bong Song, Sang-Hoon Lee
Issue Date
2011-08
Citation
Conference on Nanotechnology (IEEE-NANO) 2011, pp.1723-1727
Publisher
IEEE
Language
English
Type
Conference Paper
DOI
https://dx.doi.org/10.1109/NANO.2011.6144473
Abstract
A tunable polydimethylsiloxane (PDMS) nanoslit fabrication process was developed for biological sample manipulation. A microcontact printing (CP) of laterally spreading self-assembled hexadecanethiol (HDT) layer, combined with in-situ curing of a sliding SU-8 droplet, enabled precise and independent tuning of a nanoslit-mold width and height using single CP master mold. The SU-8 nanoslit-mold was replicated using a hard-soft composite PDMS to prevent channel collapse at low (< 0.2) aspect ratio (height over width). The fluidic characteristics as well as dimensions of nanoslits fabricated with various conditions are analyzed using fluorescein sample and AFM images. Finally, concentration polarization-based sample preconcentration is successfully demonstrated at the nanoslit boundary where an electric double layer is overlapped. © 2011 IEEE.
KSP Keywords
AFM images, Biological sample, Concentration polarization, Electric double layer(EDL), Fabrication process, Hard-soft, In-situ curing, Master mold, Microcontact printing(CP), SU-8, Sample manipulation