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학술지 The Control of Oscillation Mode in Silicon Microbeams Using Silicon Nitride Anchor
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저자
백인복, 이봉국, 김약연, 안창근, 김용준, 윤용선, 장원익, 김학성, 이상욱, 이성재, 유한영
발행일
201409
출처
Applied Physics Letters, v.105 no.10, pp.1-5
ISSN
0003-6951
출판사
American Institute of Physics (AIP)
DOI
https://dx.doi.org/10.1063/1.4895119
초록
We designed and fabricated gravimetric sensors composed of silicon (Si) microbeams surrounded by silicon nitride (SiN) anchors. The oscillation properties of the fabricated devices show that a single oscillation mode originating from quasi-one-dimensional microbeams appears at an applied alternating electric field, which motion is well matched to the theoretical predictions and is much different from the dimensionally mixed oscillation modes in normal non-anchored devices. In addition, in order to elucidate the possibilities of the devices for mass sensing applications, we measured the frequency shift as a function of mass loading in a self-assembled monolayer of 3-aminopropyltrimethoxysilane and Au nanoparticles. The resulting limit of detection was 1.05×10-18g/Hz, which is an extremely high value for micro electromechanical system gravimetric sensors relative to the normal ones.
KSP 제안 키워드
3-Aminopropyltrimethoxysilane, Alternating electric field, Au nanoparticles(Au-NPs), Gravimetric sensors, Limit of detection, Mass loading, Mass sensing, Micro-electro-mechanical system(MEMS), Oscillation mode, Oscillation properties, Quasi-one-dimensional