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Conference Paper
이층 구조 이중 초점 마이크로 렌즈 어레이 제작
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- Issue Date
- 2012-12
- Citation
- Photonics Conference 2012, pp.188-189
- Publisher
- 한국광학회
- Language
- Korean
- Type
- Conference Paper
- Abstract
- Dual-focus microlenses formed by combination of dual layers of concentric spherical lenses are fabricated through photo lithography and dry etching processes.
- KSP Keywords
- Dry etching processes, photo lithography