Subjects : Lithographic process
Type | Year | Title | Cited | Download |
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Conference | 2022 | Measurement of Spectral Noise Caused by Binarization in Computer-Generated Holograms Desgined for Lithographic Patterns Lim Yongjun International Conference on Information and Communication Technology Convergence (ICTC) 2022, pp.803-805 | 0 | 원문 |
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Type | Year | Research Project | Primary Investigator | Download |
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