Subject

Subjects : layered films

  • Articles (1)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2013 Double-Layered Passivation Film Structure of Al2O3/SiNx for High Mobility Oxide Thin Film Transistors   Park Sang-Hee  Journal of Vacuum Science and Technology B, v.31, no.2, pp.1-6 30 원문
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