Subjects : Thermal atomic layer deposition
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Journal | 2018 | 원자층 증착법을 이용한 고이동도 초박막 결정질 인듐 옥사이드 박막 트랜지스터 Lee Jongchan Applied Physics Letters, v.113, no.11, pp.1-5 | 58 | 원문 |
| Journal | 2006 | Comparative study on Chemical Stability of Dielectric Oxide Films under HF Wet and Vapor Etching for Radiofrequency Microelectromechanical System Application Yang Woo Seok Thin Solid Films, v.500, no.1-2, pp.231-236 | 20 | 원문 |
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