Subject

Subjects : Chamber pressure

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논문 검색결과
Type Year Title Cited Download
Journal 2008 Vanadium Dioxide Films Deposited on Amorphous SiO2- and Al2O3-Coated Si Substrates by Reactive RF-Magnetron Sputter Deposition   Sun Jin Yun  Japanese Journal of Applied Physics, v.47, no.4, pp.3067-3069 22 원문
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