Subject

Subjects : Supersaturation ratio

  • Articles (1)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2003 Optimization of Selective Epitaxial Growth of Silicon in LPCVD   Cheong Woo-Seok  ETRI Journal, v.25, no.6, pp.503-509 8 원문
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