Subject

Subjects : Membrane deflection

  • Articles (1)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2007 Development of a MEMS Structure for an Infrared Focal Plane Array   Seong-Mok Cho  전기학회논문지, v.56, no.8, pp.1461-1465
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