Subjects : plasma processing
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Journal | 2009 | Kinetics of Chemical Changes in Phenol Formaldehyde Based Polymeric Films Etched in N2 O and O2 Inductively Coupled Plasmas: A Comparative Study 권광호 Japanese Journal of Applied Physics, v.48, no.8, pp.1-4 | 2 | 원문 |
| Status | Year | Patent Name | Country | Family Pat. | KIPRIS |
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| Type | Year | Research Project | Primary Investigator | Download |
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