Subjects : Etching hole
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Journal | 2019 | Wafer-Level-Based Open-Circuit Sensitivity Model from Theoretical ALEM and Empirical OSCM Parameters for a Capacitive MEMS Acoustic Sensor Jaewoo Lee Sensors, v.19, no.3, pp.1-14 | 2 | 원문 |
| Journal | 2015 | Low Power Consumption Micro C2H5OH Gas Sensor Based on Micro-Heater and Ink Jetting Technique Moon Seungeon Sensors and Actuators B : Chemical, v.217, pp.146-150 | 29 | 원문 |
| Status | Year | Patent Name | Country | Family Pat. | KIPRIS |
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| Type | Year | Research Project | Primary Investigator | Download |
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