Subject

Subjects : SiGe Source

  • Articles (1)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Conference 2005 A Novel Method to Fabricate Recessed SiGe Source/Drain using a selective Si and SiGe Epitaxial Growth without Etching Process   Kim Sang Hoon  MRS Meeting 2005 (Fall), pp.1-2
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