Subjects : Pattern depth
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Conference | 2013 | Patterning of Submicron Scale Under Low Pressure Kim Zin Sig 한국 반도체 학술 대회 (KCS) 2013, pp.1-2 |
| Status | Year | Patent Name | Country | Family Pat. | KIPRIS |
|---|---|---|---|---|---|
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| Type | Year | Research Project | Primary Investigator | Download |
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