Subject

Subjects : Process layer

  • Articles (1)
  • Patents (1)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Conference 2011 A Surface-Micromachined MEMS Acoustic Sensor with Back-Plate Anchors of 100 μm Depth   Jaewoo Lee  SENSORS 2011, pp.1-4 6 원문
특허 검색결과
Status Year Patent Name Country Family Pat. KIPRIS
Registered 2018 자기 수치화 서비스 장치 KOREA KIPRIS
연구보고서 검색결과
Type Year Research Project Primary Investigator Download
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