Subjects : plasma-induced damage
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Journal | 2016 | Multi-Layered Hydrogenated P-Type Microcrystalline Silicon Windows for a-Si:H Thin Film Solar Cells on Opaque Substrates Lee Yoo Jeong International Journal of Hydrogen Energy, v.41, no.15, pp.6240-6246 | 4 | 원문 |
| Conference | 2002 | The Effects of Plasma Induced Damage on The Channel Layers of Ion Implanted GaAs MESFETs during Reactive Ion Etching(RIE) and Plasma Ashing Processes Hokyun Ahn Materials Research Society (MRS) Meeting 2002 (Spring), v.720, pp.67-72 | 1 | 원문 |
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| Type | Year | Research Project | Primary Investigator | Download |
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