Subjects : plasma application
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Journal | 2006 | Plasma-free hydrogenation of ultralow-temperature polycrystalline silicon thin-film transistors with SiNx:H as interlayer dielectric Choong-Heui Chung Applied Physics Letters, v.88, no.7, pp.1-15 | 6 | 원문 |
| Status | Year | Patent Name | Country | Family Pat. | KIPRIS |
|---|---|---|---|---|---|
| No search results. | |||||
| Type | Year | Research Project | Primary Investigator | Download |
|---|---|---|---|---|
| No search results. | ||||