Subjects : Micro-features
Type | Year | Title | Cited | Download |
---|---|---|---|---|
Conference | 2013 | Sub-22 nm Silicon Template Nanofabrication by Advanced Spacer Patterning Technique for NIL Applications Park Jong-Moon Alternative Lithographic Technologies V (SPIE 8680), pp.1-8 | 0 | 원문 |
Status | Year | Patent Name | Country | Family Pat. | KIPRIS |
---|---|---|---|---|---|
No search results. |
Type | Year | Research Project | Primary Investigator | Download |
---|---|---|---|---|
No search results. |