Subjects : Micro-features
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Conference | 2013 | Sub-22 nm Silicon Template Nanofabrication by Advanced Spacer Patterning Technique for NIL Applications Park Jong-Moon Alternative Lithographic Technologies V (SPIE 8680), pp.1-8 | 0 | 원문 |
| Status | Year | Patent Name | Country | Family Pat. | KIPRIS |
|---|---|---|---|---|---|
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| Type | Year | Research Project | Primary Investigator | Download |
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