Subject

Subjects : Si-O

  • Articles (2)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2005 Structural and Luminescence Characteristics of Post-Annealed ZnO Films on Si (111) in H2O Ambient   이주영  Japanese Journal of Applied Physics, v.44, no.1-7, pp.L205-L207 12 원문
Journal 1998 High-Quality Conformal Silicon Oxide Films Prepared by Multi-Step Sputtering PECVD and Chemical Mechanical Polishing   Min Park  Journal of Electronic Materials, v.27, no.11, pp.1262-1267 9 원문
특허 검색결과
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연구보고서 검색결과
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