Subjects : Adaptive coupled plasma
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Journal | 2013 | Dry Etching Characteristics of Indium Zinc Oxide Thin Films in Adaptive Coupled Plasma Woo Jong Chang Transactions on Electrical and Electronic Materials, v.14, no.4, pp.216-220 | 1 | 원문 |
| Status | Year | Patent Name | Country | Family Pat. | KIPRIS |
|---|---|---|---|---|---|
| No search results. | |||||
| Type | Year | Research Project | Primary Investigator | Download |
|---|---|---|---|---|
| No search results. | ||||