Subject

Subjects : Quantum Theory

  • Articles (1)
  • Patents (0)
  • R&D Reports (0)
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Type Year Title Cited Download
Journal 2024 Quantum electrodynamical formulation of photochemical acid generation and its implications on optical lithography   Seungjin Lee  ETRI Journal, v.46, no.5, pp.774-782 1 원문
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