Subjects : Silicon wet etching
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Journal | 2015 | The Effects of Electrodes Patterned onto the Piezoelectric Thin Film on Frequency Response Characteristics of PMN-PT MEMS Acoustic Actuators Hye Jin Kim Journal of Electroceramics, v.35, no.1, pp.45-52 | 10 | 원문 |
| Status | Year | Patent Name | Country | Family Pat. | KIPRIS |
|---|---|---|---|---|---|
| No search results. | |||||
| Type | Year | Research Project | Primary Investigator | Download |
|---|---|---|---|---|
| No search results. | ||||