Subject

Subjects : Corrugated diaphragm

  • Articles (1)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2004 Surface micromachined thermally driven micropump   Jang Won Ick  Sensors and Actuators A : Physical, v.115, no.1, pp.151-158 21 원문
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