Subjects : thin film stress
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Journal | 2007 | Stress Reduction of Ge2Sb2Te5 Crystallization by Capping Al2O3 Film Grown by PEALD Park Young Sam ECS Transactions, v.11, no.7, pp.245-248 | 2 | 원문 |
| Status | Year | Patent Name | Country | Family Pat. | KIPRIS |
|---|---|---|---|---|---|
| No search results. | |||||
| Type | Year | Research Project | Primary Investigator | Download |
|---|---|---|---|---|
| No search results. | ||||