Subjects : Si surface etching
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Conference | 2009 | A Surface-Micromachined MEMS Acoustic Sensor with X-Shape Bottom Electrode Anchor Jaewoo Lee SENSORS 2009, pp.1313-1316 | 12 | 원문 |
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| Type | Year | Research Project | Primary Investigator | Download |
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