Subject

Subjects : ALD process

  • Articles (5)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2021 A Systematic Study of the Interactions in the Top Electrode/Capping Layer/Thin Film Encapsulation of Transparent OLEDs   Kwon Byoung-Hwa  Journal of Industrial and Engineering Chemistry, v.93, pp.237-244 13 원문
Journal 2019 All-oxide Thin-film Transistors with Channels of Mixed InOx-ZnOy Formed by Plasma-enhanced Atomic Layer Deposition Process   Lee Jeongmu  Journal of Vacuum Science and Technology A, v.37, no.6, pp.1-7 12 원문
Journal 2013 Fabrication of Ag Nanoparticles Embedded in TiO2 Nanotubes: Using Electrospun Nanofibers for Controlling Plasmonic Effects   Jung Mi Hee  Chemistry - A European Journal, v.19, no.26, pp.8543-8549 16 원문
Journal 2007 Characteristics of Al[sub x]Ti[sub 1−x]O[sub y] Films Grown by Plasma-Enhanced Atomic Layer Deposition   Lim Jungwook  Journal of the Electrochemical Society, v.154, no.11, pp.G239-G243 26 원문
Journal 2006 Fabrication of Nano-Gap Electrode Pairs Using Atomic-Layer-Deposited Sacrificial Layer and Shadow Deposition   Park Chan Woo  Japanese Journal of Applied Physics, v.45, no.5A, pp.4293-4295 1 원문
특허 검색결과
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연구보고서 검색결과
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