Subjects : reactive ion etch
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Journal | 2014 | Pore-Size Reduction Protocol for SiN Membrane Nanopore Using the Thermal Reflow in Nanoimprinting for Nanobio-Based Sensing Dae-Sik Lee Journal of Biomedical Optics, v.19, no.5, pp.1-6 | 6 | 원문 |
| Journal | 2012 | Formation of Metal and Dielectric Liners Using a Solution Process for Deep Trench Capacitors Ham Yong-Hyun Journal of Nanoscience and Nanotechnology, v.12, no.7, pp.5897-5901 | 1 | 원문 |
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| Type | Year | Research Project | Primary Investigator | Download |
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