Subjects : Direct heating
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Journal | 2008 | A Heating Apparatus for Semiconductor Manufacturing using Direct Heating Method Jung Soonwon 전기학회논문지 P, v.57, no.4, pp.408-411 |
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| Type | Year | Research Project | Primary Investigator | Download |
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