Subjects : Sputtering parameters
Type | Year | Title | Cited | Download |
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Journal | 2014 | Optimisation of Bi-Layer Resist Overhang Structure Formation and SiO2 Sputter-Deposition Process for Fabrication of Gold Multi-Electrode Array Kim Yong Hee RSC Advances, v.5, no.9, pp.6675-6681 | 5 | 원문 |
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Type | Year | Research Project | Primary Investigator | Download |
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