Subjects : KOH wet etching
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Conference | 2009 | Novel Micro Capacitive Inclinometer with Oblique Comb Electrode and Suspension Spring Aligned Parallel to {111} Vertical Planes of (110) Silicon 정대훈 International Conference on Micro Electro Mechanical Systems (MEMS) 2009, pp.797-800 | 4 | 원문 |
| Status | Year | Patent Name | Country | Family Pat. | KIPRIS |
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| Type | Year | Research Project | Primary Investigator | Download |
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