Subjects : Membrane diameter
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Conference | 2008 | Surface-Micromachined Deep Back Chamber MEMS Acoustic Sensor Using Two Sacrificial Layers Jaewoo Lee SENSORS 2008, pp.569-572 | 5 | 원문 |
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| Type | Year | Research Project | Primary Investigator | Download |
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