Subjects : Template fabrication
Type | Year | Title | Cited | Download |
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Journal | 2011 | Sub-30 nm Gate Template Fabrication for Nanoimprint Lithography Using Spacer Patterning Technology Park Kun Sik Journal of Nanoscience and Nanotechnology, v.11, no.2, pp.1625-1628 | 5 | 원문 |
Journal | 2010 | Sub-50 nm Template Fabrications for Nanoimprint Lithography Using Hydrogen Silsesquioxane and Silicon Nitride Shim Jae Yeob Journal of Nanoscience and Nanotechnology, v.10, no.5, pp.3628-3630 | 4 | 원문 |
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