Subject

Subjects : etch damage

  • Articles (1)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2019 Origin of the Dry Etch Damage in the Short-channel Oxide Thin-film Transistors for High Resolution Display Application   Ji Hun Choi  Thin Solid Films, v.674, pp.71-75 7 원문
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