Subjects : etch damage
Type | Year | Title | Cited | Download |
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Journal | 2019 | Origin of the Dry Etch Damage in the Short-channel Oxide Thin-film Transistors for High Resolution Display Application Ji Hun Choi Thin Solid Films, v.674, pp.71-75 | 7 | 원문 |
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Type | Year | Research Project | Primary Investigator | Download |
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