Subject

Subjects : Films by pulsed laser deposition

  • Articles (1)
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논문 검색결과
Type Year Title Cited Download
Journal 2004 Amorphous Silicon Carbon Nitride Films Grown by the Pulsed Laser Deposition of a SiC-Si3N4 Mixed Target   Rae-Man Park  ETRI Journal, v.26, no.3, pp.257-261 12 원문
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