Subjects : KOH silicon etching
Type | Year | Title | Cited | Download |
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Journal | 2009 | Adjusting Resonant Wavelengths and Spectral Shapes of Ring Resonators using a Cladding SiN Layer or KOH Solution Park Sahnggi Optics Express, v.17, no.14, pp.11884-11891 | 8 | 원문 |
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